Lessard Research Group - Next Generation Materials for Next Generation Applications

Physical Vapour Deposition Chamber

Organic Electronic prototypes are fabricated in our custom physical vapour deposition system. The system was assembled by Angstrom Engineering and is equipped with 6 thermal evaporation sources, combinatory shuttering, substrate heating stage, shelf with robotic arm for in-situ mask changes and more. The chamber is built into a dual glove box to facilitate inert transfers of substrates into the chamber. The glove boxes are equipped with built in spin coater and vacuum oven to facilitate solution processing of films prior to thermal evaporation.